Rigaku Launches Sales of the XHEMIS TX-3000, a TXRF Analytical System for Leading-edge Semiconductor Processes
Measurement result of surface contaminant distribution Rigaku Corporation, a global solution partner in X-ray analytical systems and a Group company of Rigaku Holdings Corporation (headquarters: Akishima, Tokyo; CEO: Jun Kawakami; hereinafter “Rigaku”) has launched sales of the XHEMIS (pronounced “ZEM-mis”) TX-3000, a total reflection X-ray fluorescence (TXRF) system that supports analysis of trace contamination on…